Volume 80 l, suitable for PLASMACLEAN© and ACTIPLAS©
Technical data
| Encumbrances: | Cabinet, 600 mm x 1900 mm x 800 mm |
| Vacuum chamber: | Material Stainless steel Volume: 80 l Measure: 400 mm x 400 mm x 500 mm |
| Gas flow control: | 2 to 4 automatic mass flow controllers (MFC) |
| High frequency equipment | Selectable between Microwaves: electrode PE GIGATRON©, 0 a 1000 Watt. 2,45 GHz RF: 0 to 1200 Watt. 13,56 MHz, with matching box LF: 0 to 1250 Watt, 40 to 300 kHz |
| Safety equipment | Inductive sensor in the door, emergency stop, low pressure switch |
| Controls: | PLC, screen (4 x 20 characters), panel keyboard, Users can program any needed parameter |
| Utilities: | Energy supply: 400 V, (L1, L2, L3, N, P), 50 Hz Compressed air: 6 bar, dry and oil free Process gas pressure: 1 to 1,5 bar Power consumption: max. 5,5 kW Cooling water: 2 to 3 bar, 3 to 7 l/min. |
| Weight: | ca. 280 kg, without vacuum pumps |
| Vacuum pump: | Vacuum pump resisting chemicals, PFPE oil |
| Certifications: | CE mark |
Optional:
| Rotating drum | Volume utile 14 l |
| On board PC: | OS: Windows® with control software |
| Printer and modem: | Printer and modem for remote assistance and diagnostic |
| Vacuum measure: | Vacuum control system Baratrón |