• Via della Brughiera, 14 - 23899 Robbiate (LC)
  • 0399515823
Volume 80 l, suitable for PLASMACLEAN© and ACTIPLAS©

Technical data

Encumbrances:Cabinet, 600 mm x 1900 mm x 800 mm
Vacuum chamber:Material Stainless steel Volume: 80 l

Measure: 400 mm x 400 mm x 500 mm

Gas flow control:2 to 4 automatic mass flow controllers (MFC)
High frequency equipmentSelectable between

Microwaves: electrode PE GIGATRON©, 0 a 1000 Watt. 2,45 GHz

RF: 0 to 1200 Watt. 13,56 MHz, with matching box

LF: 0 to  1250 Watt, 40 to 300 kHz

Safety equipmentInductive sensor in the door, emergency stop, low pressure switch
Controls:PLC, screen (4 x 20 characters), panel keyboard, Users can program any needed parameter
Utilities:Energy supply: 400 V, (L1, L2, L3, N, P), 50 Hz

Compressed air: 6 bar, dry and oil free

Process gas pressure: 1 to 1,5 bar

Power consumption: max. 5,5 kW

Cooling water: 2 to 3 bar, 3 to 7 l/min.

Weight:ca. 280 kg, without vacuum pumps
Vacuum pump:Vacuum pump resisting chemicals, PFPE oil
Certifications: CE mark


Rotating  drumVolume utile 14 l
On board PC:OS: Windows® with control software
Printer and modem:Printer and modem for remote assistance and diagnostic
Vacuum measure:Vacuum control system Baratrón