• Via della Brughiera, 14 - 23899 Robbiate (LC)
  • 0399515823
Volume 80 l, suitable for any PECVD process

Technical data

Encumbrances:Cabinet, 1200 mm x 2000 mm x 950 mm
Vacuum chamber:Material Stainless steel Volume: 80 l

Measure: 400 mm x 400 mm x 500 mm

Gas flow control:Automatic mass flow controller (MFC)
High frequency equipment13,56 MHz with matching box
Safety equipmentInductive sensor in the door, emergency stop
Controls:IPC with color screen, Siemens S7-SPS, software ProTool Pro, OS Windows©
Utilities:Energy supply: 400 V, 32A, 50 Hz

Compressed air: 6 bar, dry and oil free

Process gas:1 a 1,5 bar Potenza: max. 8,5 kW

Cooling water: 2 to 3 bar, 6 to 11 l/min.

Weight:ca. 360 kg, without vacuum pumps
Vacuum pump:Vacuum pump system with multiple stages
Certifications: CE mark


Printer and Modem:Printer and modem for remote assistance and diagnostic