• Via della Brughiera, 14 - 23899 Robbiate (LC)
  • 0399515823

Volume 730 l, suitable for any PECVD process

Technical data

Encumbrances:Cabinet, 1650 mm x 2050 mm x 3200 mm
Camera:Material Stainless steel Volume: 730 l

Measure: 900 mm x 900 mm x 900 mm

Gas flow controls:Automatic mass flow controller (MFC)
Working pressure:1 to 100 Pa
RF Frequency:Water cooled electrode
Safety equipmentInductive sensor in the door, emergency stop
ControlsIPC with color screen, Siemens S7-SPS, software ProTool ProWindows©
Energy supply: 400 V, (L1, L2, L3, N, P), 50 Hz

Compressed air: 6 bar, dry and oil free

Process gas pressure: from1 a 1,5 bar

Power consumption: max. 30 kW

Cooling water:  2 to 3 bar, 6 to 11 l/min.

Weight:ca. 1000 kg, without vacuum pumps
Vacuum pump:Vacuum pump system with multiple stages
Certifications: CE mark


Printer and Modem:Printer and modem for remote assistance and diagnostic