Volume 730 l, suitable for any PECVD process
Technical data
| Encumbrances: | Cabinet, 1650 mm x 2050 mm x 3200 mm | |
| Camera: | Material Stainless steel Volume: 730 l Measure: 900 mm x 900 mm x 900 mm | |
| Gas flow controls: | Automatic mass flow controller (MFC) | |
| Working pressure: | 1 to 100 Pa | |
| RF Frequency: | Water cooled electrode | |
| Safety equipment | Inductive sensor in the door, emergency stop | |
| Controls | IPC with color screen, Siemens S7-SPS, software ProTool ProWindows© | |
| Utilities: |
| |
| Weight: | ca. 1000 kg, without vacuum pumps | |
| Vacuum pump: | Vacuum pump system with multiple stages | |
| Certifications: | CE mark |
Optional:
| Printer and Modem: | Printer and modem for remote assistance and diagnostic |