Volume 45 l, suitable for any PECVD coatings
Technical data
| Encumbrances: | Cabinet, 1200 mm x 2000 mm x 950 mm |
| Vacuum chamber: | Material Stainless steel Volume: 45 l Measure: 350 mm x 300 mm x 430 mm |
| Gas flow control: | Automatic mass flow controller (MFC) |
| High frequency system: | 13,56 MHz with matching box RF |
| Safety equipment | Inductive sensor in the door, emergency stop |
| Controls | IPC with screen, Siemens S7-SPS, software ProTool Pro, OS: Windows© |
| Utilities: | Energy supply: 400 V, 16A, 50 Hz Compressed air: 6 bar, dry and oil free Process gas:1 to 1,5 bar Power consumption: max. 3,5 kW Cooling water: 2 to 3 bar, 1 to 3 l/min. |
| Weight: | ca. 240 kg, without vacuum pumps |
| Vacuum pump: | Vacuum pump systems with multiple stages |
| Certifications: | CE mark |
Optional:
| Printer e Modem: | Printer and modem for remote assistance and diagnostic |