• Via della Brughiera, 14 - 23899 Robbiate (LC)
  • 0399515823
Volume 45 l, suitable for any PECVD coatings

Technical data

Encumbrances:Cabinet, 1200 mm x 2000 mm x 950 mm
Vacuum chamber:Material Stainless steel Volume: 45 l

Measure: 350 mm x 300 mm x 430 mm

Gas flow control:Automatic mass flow controller (MFC)
High frequency system:13,56 MHz with matching box RF
Safety equipmentInductive sensor in the door, emergency stop
IPC with screen, Siemens S7-SPS, software ProTool Pro, OS: Windows©
Utilities:Energy supply: 400 V, 16A, 50 Hz

Compressed air: 6 bar, dry and oil free

Process gas:1 to 1,5 bar

Power consumption: max. 3,5 kW

Cooling water: 2 to 3 bar, 1 to 3 l/min.

Weight:ca. 240 kg, without vacuum pumps
Vacuum pump:Vacuum pump systems with multiple stages
Certifications: CE mark


Printer e Modem:Printer and modem for remote assistance and diagnostic