Volume 80 l, suitable for any PECVD process
Technical data
| Encumbrances: | Cabinet, 1200 mm x 2000 mm x 950 mm |
| Vacuum chamber: | Material Stainless steel Volume: 80 l Measure: 400 mm x 400 mm x 500 mm |
| Gas flow control: | Automatic mass flow controller (MFC) |
| High frequency equipment | 13,56 MHz with matching box |
| Safety equipment | Inductive sensor in the door, emergency stop |
| Controls: | IPC with color screen, Siemens S7-SPS, software ProTool Pro, OS Windows© |
| Utilities: | Energy supply: 400 V, 32A, 50 Hz Compressed air: 6 bar, dry and oil free Process gas:1 a 1,5 bar Potenza: max. 8,5 kW Cooling water: 2 to 3 bar, 6 to 11 l/min. |
| Weight: | ca. 360 kg, without vacuum pumps |
| Vacuum pump: | Vacuum pump system with multiple stages |
| Certifications: | CE mark |
Optional:
| Printer and Modem: | Printer and modem for remote assistance and diagnostic |